IEDM2024|The Development and Future of MEMS Technology

Introduction

The micro-electro-mechanical systems (MEMS) industry is experiencing significant growth and transformation, driven by emerging applications across various fields. This article explores the current state and future directions of MEMS technology, highlighting key innovations and market trends [1].

Market Overview and Growth Trajectory

The MEMS market is projected to reach $20 billion in annual sales by 2029. Automotive applications hold 50% of the market share, consumer/wearable electronics account for 35%, and industrial applications make up the remaining 15%. New applications such as automotive navigation, wearable vital sign monitoring solutions, and MEMS-based machine-to-machine interfaces are fueling this growth.

Figure 1: Forecasted MEMS market growth from $14.6 billion in 2023 to $20 billion in 2029, segmented by consumer, industrial, telecommunications, automotive, medical, and defense/aerospace markets.

Performance Improvements and Technology Advances

MEMS technology has seen remarkable improvements across multiple performance metrics over the past decade. Power consumption decreased by 91%, accelerometer noise reduced by 73%, temperature stability improved by 83%, and gyroscope noise decreased by 87%. Concurrently, device size has shrunk by 70%, and measurement range increased by 100%.

Figure 2: Comparative chart of performance improvements from 2009 to 2019, including reduced power consumption, noise, and enhanced stability.

Smart Integration and Artificial Intelligence Capabilities

Modern MEMS devices incorporate “SMART” sensors embedded with artificial intelligence technologies, including machine learning core (MLC), adaptive self-configuration (ASC), and intelligent sensor processing unit (ISPU). This integration ensures seamless interaction with other sensors and creates ecosystems for co-creation of customer value.

Figure 3: Interconnectivity of modern MEMS systems across physical, informational, and cognitive domains.

Vertical Analog Front-End (vAFE) Technology

The newly introduced vAFE technology marks a significant advancement in MEMS sensor design. This approach integrates AFE functionalities directly into motion MEMS devices, allowing data from other sensors on the same circuit board or device to be read, reducing analog components and power consumption.

Figure 4: Efficient integration of analog front-end functions with MEMS sensors using vAFE technology.

Biosensors and Vital Sign Monitoring

Advanced MEMS biosensors, integrating biopotential and motion signals through vAFE, are revolutionizing vital sign monitoring (VSM). These systems provide synchronized measurements and context-aware analyses through embedded MLC/FSM capabilities.

Figure 5: MEMS biosensors combining motion sensing with biological signals such as EMG, ECG, and EEG measurements.

Sustainability Initiatives

The industry has made significant progress in transitioning to laed-free materials. A comprehensive roadmap has been established to replace traditional PZT materials with environmentally friendly alternatives such as AlScN, focusing on enhancing activation efficiency and sensor signal-to-noise ratio.

Figure 6: Timeline depicting industry commitments towards sustainability through the advancement of lead-free MEMS technologies.

Energy Consumption and Data Growth

The relationship between data growth and energy consumption presents both challenges and opportunities for MEMS technology. The global datasphere is rapidly expanding, accompanied by increased power consumption in data centers.

Figure 7: Correlation between data volume growth and energy consumption in data centers from 2020 to 2030.

MEMS technology, driven by these advancements and market trends, continues to play a pivotal role in various applications, from automotive systems to medical devices. The industry's focus on sustainability, performance improvements, and smart integration ensures its central role in future technological developments.

Reference

[1] Hofmeister, "Emerging applications driving future MEMS product and technology development," in Proc. IEEE Int. Electron Devices Meeting (IEDM), Dec. 2024.